Substrate transfer devices, systems and methods of use thereof

ABSTRACT

The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a robot can include a first mover configured to be driven by a platform of a linear motor, a support structure disposed on the first mover, a first robot arm attached to the first end of the support structure at a shoulder axis, and a first arm drive assembly. The first drive assembly can include a first pulley attached to a first end of the support structure and to the first robot arm at the shoulder axis, a second pulley attached to a second end of the support structure, a first band connecting the first pulley to the second pulley, and a second mover configured to be driven by the platform of the linear motor, where the second mover is connected to the first band, and where motion of the second mover relative to the first mover causes the first band to a) rotate the first pulley and the second pulley and b) rotate the first robot arm around the shoulder axis. Also disclosed are systems and methods incorporating the robot.

FIELD

The disclosure relates generally to the field of robotics and substratetransfer systems that transport substrates between chambers within anisolated environment. More particularly, disclosed are variousembodiments of a robot driven by magnetic levitation within a transferchamber, wherein the robot can transfer substrates between the transferchamber and a plurality of process chambers connected thereto. Alsodisclosed are systems and methods including the various embodiments ofthe robot.

BACKGROUND

Semiconductor devices are produced on semiconductor substrates usingnumerous process steps within several process chambers. Each processchamber is used to complete one or more of the various steps (e.g.,etching, polishing, depositions) to form the semiconductor devices.Substrate transfer systems are used to move the substrates between eachof the process chambers. The process chambers and the substrate transfersystem can each be held under vacuum. A common arrangement used forsubstrate transfer systems is a linear arrangement where processchambers are arranged in rows along each side of a linear (rectangular)chamber.

A substrate transfer system using a linear arrangement typicallyincludes a robot. The robot is configured to run linearly back and forthalong the linear chamber. Conventional robots for linear chambers arerail mounted and/or use electrical motors that are powered by anelectric cable. These electrically powered components generate heat andthe movement of the robots along the hard rails as well as the movementof electric cables along the chamber can generate particulatecontaminants. When the linear chamber is evacuated, for example, whentransferring a substrate from a load lock to a transfer chamber usingthe robot, the particulates may form a dust some of which may land onthe substrate. Such contamination results in costly defects on thesubstrate.

BRIEF SUMMARY

According to various embodiments, disclosed herein is a robot,comprising a first mover configured to be driven along a platform of alinear motor; a support structure disposed on the first mover; a firstrobot arm attached to the first end of the support structure at ashoulder axis; and a first arm drive assembly. The first arm driveassembly comprises a first pulley attached to a first end of the supportstructure and to the first robot arm at the shoulder axis; a secondpulley attached to a second end of the support structure; a first bandconnecting the first pulley to the second pulley; and a second moverconfigured to be driven along the platform of the linear motor, whereinthe second mover is connected to the first band, and wherein motion ofthe second mover relative to the first mover causes the first band to a)rotate the first pulley and the second pulley and b) rotate the firstrobot arm around the shoulder axis.

In further embodiments, disclosed herein is a robot, comprising: a firstmover configured to be driven along a platform of a linear motor; asupport structure disposed on the first mover; a first robot armpositioned above the first mover and on the support structure at ashoulder axis; and a first arm drive assembly. The first arm driveassembly comprises a first pulley disposed at a first end of the supportstructure and attached to the first robot arm at the should axis; asecond pulley disposed at a second end of the support structure; a firstband connecting the first pulley to the second pulley; a second moverconfigured to be driven along the platform of the linear motor; and afirst vertical shaft coupled to the second mover, wherein the secondpulley is connected to the first vertical shaft, and wherein rotation ofthe second mover causes a) the second pulley to rotate the first bandand b) the first band to rotate the first pulley and the first robot armabout the shoulder axis.

According to various embodiments, further disclosed herein is anelectronic device processing system, comprising: a transfer chambercomprising a magnetic levitation platform; and a robot disposed in thetransfer chamber above the magnetic levitation platform, the robotcomprising: a first mover configured to be driven by the magneticlevitation platform; a support structure disposed on the first mover; afirst robot arm attached to a first end of the support structure at ashoulder axis; and a first arm drive assembly. The first arm driveassembly comprises a first pulley attached to the first end of thesupport structure and to the first robot arm at the shoulder axis; asecond pulley attached to a second end of the support structure; a firstband connecting the first pulley to the second pulley; and a secondmover configured to be driven by the magnetic levitation platform,wherein the second mover is connected to the first band, and whereinmotion of the second mover relative to the first mover causes the firstband to a) rotate the first pulley and the second pulley and b) rotatethe first robot arm around the shoulder axis.

In further embodiments, disclosed herein is a method of transferringsubstrates between a transfer chamber and a plurality of processchambers, wherein the transfer chamber comprises a magnetic levitationplatform, the method comprising: causing, by a magnetic levitationplatform, a robot arm of a robot arm assembly comprising the robot armand a plurality of movers to pick up a first substrate, by causing, bythe platform, a first mover of the plurality of movers to rotate or tochange a first distance to a second mover of the plurality of movers,wherein rotation of the first mover or the change in the first distancebetween the first mover and the second mover causes the robot arm torotate about a shoulder axis; and causing, by the platform, one of a)the second mover to rotate or b) a third mover to change a seconddistance to the second mover, wherein rotation of the second mover orthe change in the second distance between the third mover and the secondmover causes the robot arm to raise or lower.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is illustrated by way of example, and not by wayof limitation, in the figures of the accompanying drawings in which likereferences indicate similar elements.

FIG. 1A is a schematic showing a side view of a robot according toembodiments described herein.

FIG. 1B is a schematic showing a top view of a robot according toembodiments described herein.

FIG. 1C depicts a perspective view of a robot with movers that are notlinearly aligned along a longitudinal axis of a transfer chamberaccording to embodiments described herein.

FIG. 1D depicts a side view of the robot of FIG. 1C according toembodiments described herein.

FIG. 2 is a schematic showing a side view of a robot according toembodiments described herein.

FIG. 3 is a top view showing an embodiment of a robot arm according tovarious embodiments.

FIG. 4 is a top view showing an embodiment of a dual robot arm accordingto embodiments.

FIG. 5 is a schematic of a magnetic levitation platform and guides for amover according to embodiments herein.

FIG. 6 is a schematic of a mover having multiple posts attached theretoaccording to embodiments described herein.

FIG. 7 illustrates a method of transferring substrates between atransfer chamber and a plurality of process chambers according tovarious embodiments.

FIG. 8 illustrates a method of transferring substrates between atransfer chamber and a plurality of process chambers according tovarious embodiments.

DETAILED DESCRIPTION

Described herein are embodiments of a non-friction linear robot forvacuum and atmospheric chamber applications. The architecture of therobot includes a robot arm with one or more segments that are movableabout one or more axes, but without any electrical power being providedto the robot arm (e.g. to the axes). Embodiments of the robot include aplurality of linear magnetic levitation movers (also referred to simplyas movers) the relative position of which define a position of the robotarm and/or a rotational angle of each of the axes. The robot, accordingto various embodiments, enables the use of long linear motors in avacuum (or atmospheric) chamber without the need of a long electricalcable running to the robot arm or to the motor axes. Eliminating thedelivery of power to the in-vacuum components also eliminates coolingcomponents within the vacuum chamber because all of the power componentsmay be positioned on an atmospheric side of the transfer chamber. Thevarious embodiments of the robots and related systems and methodsdescribed herein limit particle generation since there is no frictionbetween a moving robot and a main frame and fewer or no mechanicalbearings in the transfer chamber. The low particle generation also is aresult of lowering or eliminating outgassing from grease, which isrequired for the bearings, and from electrical cables and connectors,which are unnecessary for a magnetic levitation drive. As such, robotsand related systems according to embodiments herein have low maintenanceand a longer life because of little or no grease to replace, and fewerfrictional and mechanical elements that can reduce reliability.

According to embodiments, a robot as described herein, operates one ormore robot arms independently and provides a common vertical movement tothe one or more robot arms. It can include a plurality of linear movers,a first (main) mover, and one or more additional movers. One of theadditional movers can actuate vertical movement using a wedge platform(or other means) mounted on the top of the first (main) mover. As willbe described in more detail below, changing the horizontal distancebetween the mover for providing vertical movement (i.e., the verticalmover) and the first (main) mover can raise or lower the robot arm. Therobot can further include a support structure (e.g., a cantileveredbeam) having one or more pulleys (e.g., including bearings) on both endsof the support structure. Sets of the one or more pulleys are linkedwith bands (e.g., metal or made of another material). A robot arm can beattached to the one or more pulleys positioned above the first (main)mover. At least one of the one or more additional movers may be attachedto a respective band via a small post. The one or more additional moversmove the bands by changing their horizontal distance to the first (main)mover, which correspondingly rotates a robotic arm attached thereto.

According to further embodiments, a robot, as will be described in moredetail below, can be configured to independently move two arms and toprovide a common vertical motion for the two or more arms. The robot canaccomplish moving the two arms and providing vertical motion by usingthree (3) movers, for example. The movers can rotate the armsindependently and move linearly together. A support structure links themovers together via, for example, bearings.

More particularly, according to various embodiments, disclosed herein isa robot for moving substrates within a transfer chamber and fortransferring the substrates between the transfer chamber and a pluralityof process chambers connected thereto. The robot can operate in both avacuum environment and an atmospheric environment and can transfersubstrates between the chambers without breaking vacuum or opening theenvironment.

Reference throughout this specification to, for example, “oneembodiment,” “certain embodiments,” “one or more embodiments” or “anembodiment” means that a particular feature, structure, material, orcharacteristic described in connection with the embodiment is includedin at least one embodiment of the invention. Thus, the appearances ofthe phrases such as “in one or more embodiments,” “in certainembodiments,” “in one embodiment” or “in an embodiment” in variousplaces throughout this specification are not necessarily referring tothe same embodiment of the invention. Furthermore, the particularfeatures, structures, materials, or characteristics may be combined inany suitable manner in one or more embodiments.

As used herein, the singular forms “a,” “an,” and “the” include pluralreferences unless the context clearly indicates otherwise. Thus, forexample, reference to “a lift pin” includes a single lift pin as well asmore than one lift pin.

As used herein, the term “about” in connection with a measured quantity,refers to the normal variations in that measured quantity as expected byone of ordinary skill in the art in making the measurement andexercising a level of care commensurate with the objective ofmeasurement and the precision of the measuring equipment. In certainembodiments, the term “about” includes the recited number ±10%, suchthat “about 10” would include from 9 to 11.

The term “at least about” in connection with a measured quantity refersto the normal variations in the measured quantity, as expected by one ofordinary skill in the art in making the measurement and exercising alevel of care commensurate with the objective of measurement andprecisions of the measuring equipment and any quantities higher thanthat. In certain embodiments, the term “at least about” includes therecited number minus 10% and any quantity that is higher such that “atleast about 10” would include 9 and anything greater than 9. This termcan also be expressed as “about 10 or more.” Similarly, the term “lessthan about” typically includes the recited number plus 10% and anyquantity that is lower such that “less than about 10” would include 11and anything less than 11. This term can also be expressed as “about 10or less.”

Unless otherwise indicated, all parts and percentages are by weight.Weight percent (wt. %), if not otherwise indicated, is based on anentire composition free of any volatiles, that is, based on dry solidscontent.

FIG. 1A is a schematic showing a side view of a robot 100 according toembodiments described herein. FIG. 1B is a schematic showing a top viewof the robot 100 according to embodiments described herein. According tovarious embodiments, as shown in FIGS. 1A and 1B, a robot 100 caninclude a first (main) mover 102 configured to be driven along a base104 of a linear motor. The base 104 can be a magnetic levitationplatform of the linear motor. The linear motor can be any suitable motorknown to those of ordinary skill in the art. The robot 100 can furtherinclude a support structure 108 disposed on the first mover 102.According to embodiments, the support structure 108 can be acantilevered beam having one or more pulleys (e.g., including bearings)116, 118, 130, 132 on both ends of the support structure 108. Inaddition to or instead of the cantilevered beam, a mover positioned atthe opposite end of the base 104 (not shown) and configured to move inunison with the first mover can support moment loads.

According to embodiments, a first robot arm 110 can be attached to afirst end 112 of the support structure 108 at a shoulder axis 114. Forexample, the first robot arm 110 can be attached to the first end 112via a first pulley 116. The first robot arm 110 can be driven by a firstarm drive assembly comprising the first pulley 116 and a second pulley118 attached to a second end 120 of the support structure 108. Accordingto embodiments, a first band 122 can be positioned on the first pulley116 and the second pulley 118. Accordingly, horizontal movement of thefirst band 122 can cause the first pulley 116 to rotate about theshoulder axis 114 and can additionally cause the second pulley 118 torotate.

According to embodiments, robot 100 can further include a second mover124 configured to be driven by the base 104 of the linear motor. Thesecond mover 124 can include a post 126 attached to the first band 122.Relative motion of the second mover 124 to the first mover 102 causesthe first band 122 to move about the first pulley 116 and the secondpulley 118. Motion of the first band 122 rotates the first pulley 116and the second pulley 118, for example, via a corresponding firstbearing and a second bearing. Rotation of the first band 122 about thefirst pulley 116 rotates the first robot arm 110 about the shoulder axis114.

According to further embodiments, robot 100 can further include a secondrobot arm 128 attached to the support structure 108 at the shoulder axis114. The second robot arm 128 can be attached to a third pulley 130attached to the first end 112 of the support structure 108. Inembodiments, the third pulley 130 can share an axis of rotation with thefirst pulley 116 and can be positioned above or below the first pulley116. The second robot arm 128 can be driven by a second arm driveassembly comprising the third pulley 130 and a fourth pulley 132attached to the second end 120 of the support structure 108. The fourthpulley 132 can share an axis of rotation with the second pulley 118.According to embodiments, a second band 134 may be positioned about thethird pulley 130 and the fourth pulley 132, and may connect the thirdpulley 130 to the fourth pulley 132. According to embodiments, the firstarm 110 and the first arm drive assembly can be positioned above orbelow the second arm 128 and the second arm drive assembly.

In various embodiments, robot 100 can further include a third mover 136configured to be driven by the base 104 of the linear motor. The thirdmover 136 can include a post 138 attached to the second band 134.Relative motion of the third mover 136 to the first mover 102 causes thesecond band 134 move about the third pulley 130 and the fourth pulley132. Motion of the second band 134 rotates the third pulley 130 and thefourth pulley 132, for example, via a corresponding first bearing and asecond bearing. Rotation of the second band 134 about the third pulley130 respectively rotates the second robot arm 128 about the shoulderaxis 114.

According to certain embodiments, the robot 100 can further include athird robot arm (not shown) attached to the support structure 108 at theshoulder axis 114. The third robot arm 146 can be attached to thesupport structure 108 via a fifth pulley (not shown) attached to thefirst end 112 of the support structure 108. In certain embodiments, thefifth pulley can share an axis of rotation with the first pulley 116 andcan be positioned above the third pulley 130. The third robot arm 146can be driven by a third arm drive assembly comprising the fifth pulleyand a sixth pulley (not shown) attached to the second end 120 of thesupport structure 108. The sixth pulley can share an axis of rotationwith the second pulley 118. According to embodiments, a third band maybe positioned about the fifth pulley and sixth pulley.

Robot 100 can further include a fourth mover (not shown) configured tobe driven by the base 104 of the linear motor. The fourth mover caninclude a post (not shown) attached to the third band. Relative motionof the fourth mover to the first mover 102 causes the third band to moveabout the fifth pulley and the sixth pulley. Motion of the third bandrotates the fifth pulley and the sixth pulley, for example, viacorresponding bearings. Rotation of the third band about the fifthpulley respectively rotates the third robot arm 146 about the shoulderaxis 114.

It should be noted that the robot 100 can include a plurality of robotarms and associated drive assemblies. For example, the robot 100 caninclude one, two, three, four, five and so on robot arms together withrespective drive assemblies. The pulleys of each of the robot arms mayshare common axes as described above.

In further embodiments, the robot 100 can include a lift mechanism 140attached to the first mover 102. The lift mechanism 140 can be in theform of a wedge lift configured to raise and lower the support structure108 and the one or more robot arms 110, 128, etc. attached thereto. Thelift mechanism 140 can be coupled to a lift mover 142 (also referred toas a z mover or a third mover in embodiments with only one robot arm)configured to be driven by the base 104 of the linear motor. The liftmover 142 can be connected to the lift mechanism 140 such that motion ofthe lift mover 142 relative to the first mover 102 (e.g., motion of thelift mover 142 towards or away from the first mover 102) causes the liftmechanism 140 to adjust a height (e.g., a z-direction) of the supportstructure 108 and the one or more robot arm 110, 128 etc. attachedthereto. For example, a decrease in distance between the first mover 102and the lift mover 142 causes the wedge lift 140 to raise the supportstructure 108 and the one or more robot arm 110, 128, etc. Conversely,an increase in the distance between the first mover 102 and the liftmover 142 causes the wedge lift 140 to lower the support structure 108and the one or more robot arm 110, 128, etc.

Each of the main (or first) mover 102, second mover 124, third mover 136and lift mover 142 may be independently driven by the base 104 of thelinear motor. Each of the movers may move in unison to move the entirerobot assembly linearly within the transfer chamber. Lift mover 142 maymove relative to the first mover 102 to raise or lower the robot arms110, 128, mover 124 may move relative to the first mover 102 toreposition robot arm 110, and mover 136 may move relative to first mover102 to reposition robot arm 128. Accordingly, coordinated movement ofthe various movers 102, 124, 136, 142 may cause one or more of the robotarms 110, 128 to pick up one or more wafers from a first location (e.g.,from a load lock), move the one or more wafers to a second location(e.g., to a process chamber), and place the one or more wafers at thesecond location.

In some embodiments, the various movers 102, 124, 136, 142 are alignedalong a longitudinal axis of the transfer chamber (e.g., in a singlerow). For example, the movers 102, 124, 136, 142 may all be in a line,and may optionally all follow along a single track. In embodiments, oneor more movers may not be arranged in a line and/or may be arranged intwo or more rows (e.g., three rows, four rows, etc.). For example, firstmover 102 may be on a first track, second mover 124 may be on a secondtrack that is parallel to the first track, third mover 136 may be on athird track that is parallel to the first and second track, and so on.In other embodiments, a subset of movers may be on a first track, andanother subset of movers may be on a second track that is parallel tothe first track. If movers are not lined up (e.g., are offset from oneanother in a direction perpendicular to the longitudinal axis of thetransfer chamber), then a greater range of motion of the movers may bepossible. For example, in FIG. 1B as illustrated, second mover 124 maybe limited in motion based on the distances to mover 142 and mover 136.However, if second mover 124 is not lined up with mover 142 and mover136, then it could potentially move in front of mover 142 or behindmover 136. By positioning the movers along different rows, the robotassembly may be more compact than if the movers are all placed along asingle row.

FIG. 1C depicts a perspective view of a robot with movers that are notlinearly aligned along a longitudinal axis of a transfer chamber,according to embodiments described herein. FIG. 1D depicts a side viewof the robot of FIG. 1C, according to embodiments described herein.FIGS. 1C-1D illustrate an embodiment in which multiple tracks are used,and in which different movers move along different tracks.Alternatively, tracks may be omitted, but movers may still be offset asshown in FIGS. 1C-1D.

In certain embodiments, as shown in FIG. 2 , a robot 200 can include alead screw 240 as part of a lift mechanism. A first nut 242 can bethreaded onto the lead screw 240 and can form a hard stop. A firstpulley 216 can be positioned about the lead screw 240 and above nut 242.The first pulley 216 can be secured onto the lead screw 240 via a secondnut 244. According to various embodiments, as shown in FIG. 2 , therobot 200 can include a first mover 202 configured to be driven by abase 204 (e.g., a magnetic levitation platform) of a linear motor. Thelinear motor can be any suitable motor known to those of ordinary skillin the art. The robot 200 can further include a support structure 208disposed on the first mover 202. According to embodiments, the supportstructure 208 can be a cantilevered beam having the first pulley 216 anda second pulley 218 (e.g., including bearings) on both ends of thesupport structure 208. The lead screw 240 can be attached to a first(main) mover 202, wherein the first pulley 216 is attached to (or restson) the first nut 242 on the lead screw 240.

According to embodiments, as shown in FIG. 2 , a first robot arm 210 canbe attached to a first end 212 of the support structure 208 at ashoulder axis 214 that may be aligned with an axis of the lead screw240. For example, the first robot arm 210 can be attached to the firstend 212 via a first pulley 216. The first robot arm 210 can be driven bya first arm drive assembly comprising the first pulley 216 and a secondpulley 218 attached to the support structure 208 as shown in FIG. 2 .According to embodiments, the first pulley 216 and the second pulley 218each can include a bearing about which a first band 222 is positioned asshown in FIG. 2 .

According to embodiments, robot 200 can further include a second mover224 configured to be driven by the base 204 of the linear motor. Inembodiments, the support structure 208 provides a fixed separationbetween the first mover 202 and the second mover 224. The second mover224 can include a post 226 (e.g., a vertical shaft) about which a nut227 is threaded. The second pulley 218 is positioned on top of the nut227. Rotational motion of the second mover 224 causes the second pulley218 to rotate, which moves the first band 222, which in turn causes thefirst pulley 216 to rotate. Rotation of the first band 212 about thefirst pulley 216, and the resulting rotation of the first pulley 216,rotates the first robot arm 210 about the shoulder axis 214. Accordingto embodiments, the post 216 is coupled to the second mover 224 suchthat the second pulley 218 is connected to the first vertical shaft 226,and rotation of the second mover 224 causes a) the second pulley 218 torotate the first band 222 and the first band 222 to rotate the firstpulley 216 and the first robot arm 210 about the shoulder axis 214.

According to various embodiments, the robot 200 can further include asecond robot arm 228 positioned above the first robot arm 210 and on thesupport structure 208 at the shoulder axis 214. Robot 200 can furtherinclude a second arm drive assembly including a third pulley 230attached to the first end of the support structure 208 and to the secondrobot arm 228 at the shoulder axis 214. The second arm drive assemblycan further include a fourth pulley 232 attached to the second end ofthe support structure 208 (e.g., attached to the second end of thesupport structure 208). A second band 234 connects the third pulley 230to the fourth pulley 232. A third mover 236 is configured to be drivenby the base 204 of the linear motor.

According to embodiments, the third mover 236 can include a post 238(i.e., a second vertical shaft) attached thereto about which a nut 239is threaded. The fourth pulley 232 can be connected to post 238.Rotational motion of the third mover 236 causes the second pulley 232 torotate, which causes the second band 234 to move about the third pulley230 and the fourth pulley 232. Motion of the second band 234 rotates thethird pulley 230, for example, via a corresponding bearing. Rotation ofthe second band 234 about the third pulley 230 respectively rotates thesecond robot arm 228 about the shoulder axis 214. Rotation of the thirdmover causes a) the fourth pulley to rotate the second band and b) thesecond band to rotate the third pulley and the second robot arm aboutthe shoulder axis.

It should be noted that the robot 200 can include a plurality of robotarms and associated drive assemblies. For example, the robot 200 caninclude one, two, three, four, five and so on robot arms together withrespective drive assemblies. The pulleys of each of the robot arms sharecommon axes as described above.

The lead screw 240 forms the lift mechanism of robot 200. The liftmechanism can raise and lower the first robot arm 210 (and any otherrobot arms). According to embodiments, rotation of the first mover 202in a first direction can cause the support structure 208, the firstrobot arm 210 (and second robot arm 228 if installed) and portions ofthe first arm drive assembly (and portions of the second arm driveassembly) to move upward vertically. Rotation of the first mover 202 inan opposite direction can cause the support structure 208, the firstrobot arm 210 (and second robot arm 228 if installed) and the portionsof the first and/or second arm drive assembly to move downwardvertically. The base 204 of the linear motor can cause one or more ofthe movers to rotate a target amount, causing the robot arms to movevertically and/or horizontally. Additionally, the base 204 can cause themovers to move linearly to move the robot assembly within a transferchamber. The movers can rotate independently and concurrently in orderto combine rotational movement and vertical movement of one or morerobot arms. Additionally, the various arms can change their anglesindependently.

An embodiment of a robot arm assembly 300 as described herein is shownin FIG. 3 . The robot arm assembly 300 includes an arm 310 that rotatesabout a should axis 314 and a forearm 313 attached to arm 310 at aforearm axis 315. The arm 310 can be movable via an arm drive assembly,and the forearm 313 can be movable via a forearm drive assembly. Theforearm drive assembly may include a first forearm pulley 352 attachedto the forearm 313 at the forearm axis 315. The forearm drive assemblycan further include a second forearm pulley 354 that can share an axis314 with the first pulley (not shown) of the robot arm section 310. Aforearm band 356 connects the first forearm pulley 352 and the secondforearm pulley 354. Rotation of the arm 310 about the shoulder axis 314causes the second forearm pulley 354 to rotate. Rotation of the secondforearm pulley 354 causes the forearm band 356 to move, which in turncauses the forearm 313 to rotate about the forearm axis 315.

The first forearm pulley 352 may have a first diameter D_(w), and thesecond forearm pulley 354 may have a second diameter D_(a). There may bea predetermined ratio between the diameter of the first forearm pulley352 and the diameter of the second forearm pulley 354. This ratio maycontrol the amount that the forearm 313 rotates about the forearm axis315 relative to the amount that the arm 310 rotates about the shoulderaxis 314. For example, if D_(a)=3*D_(w), then the forearm 313 will turnat a rate that is 3× the rate that the arm 310 turns. The robot armassembly 300 can further include an end effector (not shown) attached tothe forearm 313. The end effector can be fixed to the forearm 313 andcan support a substrate (e.g., a wafer).

In some embodiments, the robot arm assembly 300 may further include awrist (not shown) attached to the forearm at a wrist axis (not shown).The robot arm assembly may additionally include an additional pulley atthe forearm axis and an additional pulley at the wrist axis, and anadditional band around the two additional pulleys. There may be apredetermined diameter ratio between diameters of the two additionalpulleys to control an amount of rotation of the wrist relative to theamounts of rotation of the arm and forearm.

According to embodiments, as shown in FIG. 4 , a dual robot arm assembly400 can include two arms 410, 411, each of which rotates about a shouldaxis 414, 415, respectively, and a forearm 450, 451 attached to each arm410, 411, respectively, at a forearm axis 320, 321. According toembodiments, the first robot arm 410 and the second robot arm 411 can beattached to the support structure 408 via a first pulley (e.g.,including a bearing) and a second pulley (e.g., including a bearing).Each arm 410, 411 can be movable via a respective arm drive assembly,and each forearm 450, 451 can be independently movable via arespectively forearm drive assembly. Each forearm drive assemblyincludes a first forearm pulley 452 (e.g., including bearing 453), 454(e.g., including bearing 455) attached to the forearm 450, 451 at theforearm axis 420, 421. Each forearm drive assembly can further include asecond forearm pulley 456 (e.g., including bearing 457), 458 (e.g.,including bearing 459) attached to a distal end of the correspondingforearm 450, 451. Each forearm band 460, 461 connects the first forearmpulley 452, 454 and the second forearm pulley 456, 458, respectively.Rotation of each arm 410, 411 about each respective shoulder axis 414,415 causes each forearm pulley 456, 458 to rotate. Rotation of eachpulley 452, 454 causes each forearm band 460, 461 to move, which in turncauses each forearm 450, 451 to rotate about its respective forearm axis420, 421.

Forearm pulley 456, 458 may have a first diameter D_(w), and forearmpulley 457, 459 may have a second diameter D_(a). There may be apredetermined ratio between the diameter of forearm pulley 456, 458 andthe diameter of forearm pulley 457, 459. This ratio may control theamount that each forearm 450, 451 rotates about each forearm axis 414,415 relative to the amount that each arm 410, 411 rotates about eachshoulder axis 414, 415. For example, if D_(a)=3*D_(w), then each forearm450, 451 will turn at a rate that is 3x the rate that each arm 410, 411turns. The dual robot arm assembly 400 can further include an endeffector (not shown) attached to each forearm 450, 451. Each endeffector can be fixed to each forearm 450, 451 and can support asubstrate (e.g., a wafer).

The dual robot arm assembly 400 can further include a wrist (not shown)attached to each forearm 413, 414 at a wrist axis (not shown). The dualrobot arm assembly 400 may additionally include another pulley at theforearm axis 320, 321, an additional pulley at each wrist axis and acorresponding band around each of these pulleys.

In the aforementioned embodiments, vertical motion of the robot arms aswell as horizontal motion of the robot arms is controlled based onhorizontal displacement between a first mover and one or more additionalmovers. In other embodiments, vertical motion of the robot arms as wellas horizontal motion of the robot arms may be controlled by rotating oneor more movers. These one or more movers may be maintained at fixeddistances from one another in embodiments.

FIG. 5 is a schematic of a magnetic levitation platform and guides for amover according to embodiments herein. According to various embodiments,a mover 502 can be configured to move along a pair of linear guides 558,559 as shown in FIG. 5 . The linear guides 558, 559 may be positioned onthe vacuum side of the transfer chamber. The mover 502 can include a setof rollers 560, 561, 562, 563 that are configured to intermesh with thelinear guides 558, 559, as shown in FIG. 5 , and to smoothly roll alongeach track 558, 559 as the mover 502 travels back and forth. The mover502 may further include a rotary bearing 580 that enables an innerportion of the mover 502 to rotate relative to an outer portion of themover.

FIG. 6 is a schematic of a platform 602 having multiple posts 664, 665,666, 667 attached thereto according to embodiments described herein. Inembodiments, a platform 602 can contain a plurality of posts 664, 665,666, 667 extending upward therefrom. The platform may contain multiplemovers 670, 672, 674, 676, each of which may be connected to theplatform 602 via a respective rotary bearing 678, 680, 682, 684. Each ofthe movers 670, 672, 674, 676 may have a fixed distance from oneanother, but may be independently rotatable by a platform of the linearmotor. The platform 602 and its attached movers can move along linearguides 658, 659 via rollers 660, 661, 662, 663. A washer, bolt or nut668, 669, 670, 671 may be positioned around each of the plurality ofposts 664, 665, 666, 667 as shown in FIG. 6 . The washer, bolt or nut668, 669, 670, 671 may rest on a bearing/platform 672, 673, 674, 675. Atleast one of the posts 667 can be threaded. Rotation of the moverattached to the threaded post 667 may cause one or more robot arms tomove up or down vertically. Rotation of the other movers may causeassociated robot arms to rotate about a shoulder axis.

Each of the robot embodiments described herein can be operable in anelectronic device processing system. In embodiments, the electronicdevice processing system can include a transfer chamber (not shown)comprising a magnetic levitation platform (e.g., a stator) of a linearmotor. A robot according to embodiments herein can be disposed in thetransfer chamber above the magnetic levitation platform. The robot cancontain two robot arms each configured to be driven by a robot arm driveassembly. The first (main) mover, the second mover and/or third moverare configured to move in parallel paths along the magnetic levitationbase. A lift mechanism attached to the first mover can include a lift(z-motion) mover configured to be driven by the magnetic levitationbase. The third mover is connected to the lift mechanism such thatmotion of the third mover relative to the first mover causes the liftmechanism to adjust a height of the support structure and the firstrobot arm (and second robot arm, if installed), within the transferchamber.

Further disclosed herein are methods 700 for transferring substratesbetween a transfer chamber and a plurality of process chambers 702. Thetransfer chamber, to and from which substrates are transferred,comprises a magnetic levitation platform of a linear motor. At block704, the method 700 further includes providing a robot disposed in thetransfer chamber above the magnetic levitation platform. The robot canbe as described herein according to various embodiments. In embodiments,the method 700 can further include at block 706 operating the firstmover and the first arm drive assembly to move the first robot arm in alinear direction along the magnetic levitation platform and to rotatethe first arm proximate a first one of the plurality of processchambers. The first robot arm is configured to move back and forth alongthe linear transfer chamber. The main mover positions the first robotarm such that the robot arm can rotate and enter one of the processchambers connected to the transfer chamber. Movement of the second moverrelative to the first (main) mover causes the first robot arm to rotate.

In certain embodiments, the first robot arm can include a first forearmcoupled to a first forearm drive assembly as described herein. At block708, the method 700 optionally can include operating the first forearmdrive assembly to rotate the first forearm about the forearm axis. Inembodiments, a first end effector is attached to a distal end of theforearm about a wrist axis. The end effector is configured to rotateabout the wrist axis and enter a first one of the plurality of processchambers.

According to embodiments, a lift mover is configured to be driven by themagnetic levitation platform of the linear motor. The lift mover can beconnected to a lift mechanism as described herein above. Motion of thelift mover relative to the first mover can cause the lift mechanism toadjust a height of the support structure and the first robot arm (oradditional robot arms if installed). According to embodiments, the liftmechanism can include a wedge lift. Optionally, at block 710, the method700 can further include operating the lift mover to decrease distancebetween the first mover and the lift mover causing the wedge lift toraise the support structure and the first robot arm. Alternatively, themethod can optionally include at block 710 operating the lift mover toincrease the distance between the first mover and the lift mover causingthe wedge lift to lower the support structure and the first robot arm.

The method 700 can further include at block 712, optionally, operatingthe first mover and the second arm drive assembly to move the secondrobot arm in a linear direction along the magnetic levitation platformand to rotate the second arm proximate a second one of the plurality ofprocess chambers. Like the first robot arm, the second arm driveassembly can position the second arm by one of a plurality of processchamber such that the second robot arm can rotate and enter the processchamber. Like the first robot arm, the second robot arm can include asecond forearm coupled to a second forearm drive assembly as describedherein. The method 700 can include optionally operating the secondforearm drive assembly to rotate the second forearm about the forearmaxis. In embodiments, a second end effector is attached to a distal endof the second forearm about a second wrist axis. The second end effectorcan be configured to rotate about the second wrist axis and enter one ofthe plurality of process chambers. According to embodiments, the method700 can include independently operating the first robot arm driveassembly to rotate the first robot arm and the second robot arm driveassembly to robot arm drive assembly.

In yet further embodiments, method 700 can include at block 714optionally operating the first robot arm drive assembly and the secondrobot arm drive assembly to simultaneously rotate the first robot arm ina first direction and the second arm in an opposite direction. Accordingto embodiments, the first robot arm can be driven to place or remove asubstrate from one of the plurality of process chambers and a secondrobot arm can be driven to place or remove another substrate in a secondone of the plurality of process chambers on an opposite side of thetransfer chamber. At block 716, the first robot arm can be driven by thefirst robot arm drive assembly to place or remove a substrate in aprocess chamber while the second robot arm is simultaneously driven bythe second robot arm drive assembly to place or remove another substratein a different process chamber.

Further disclosed herein are methods 800 for transferring substratesbetween a transfer chamber and a plurality of process chambers 802. Thetransfer chamber, to and from which substrates are transferred, caninclude a magnetic levitation platform. The transfer chamber can be asdescribed herein according to various embodiments. At block 804, themethod 800 can include causing, by a magnetic levitation platform, arobot arm of a robot arm assembly comprising the robot arm and aplurality of movers to pick up a first substrate. The robot arm assemblycan be as described herein according to various embodiments. At block806, the method can further include causing, by the platform, a firstmover of the plurality of movers to rotate or to change a first distanceto a second mover of the plurality of movers. Rotation of the firstmover or the change in the first distance between the first mover andthe second mover can cause the robot arm to rotate about a shoulderaxis. The method 800 can further include, at block 808, causing, by theplatform, one of a) the second mover to rotate or b) a third mover tochange a second distance to the second mover, wherein rotation of thesecond mover or the change in the second distance between the thirdmover and the second mover causes the robot arm to raise or lower.

According to embodiments, the method 800 can further include, causing,by the platform of the magnetic levitation platform, the robot armassembly and the first substrate to move proximate a first processchamber of the plurality of process chambers. In embodiments, the method800 can include optionally causing, by the platform, the second mover tomove along the magnetic levitation platform to the first processchamber, wherein the first mover and the third mover move together withthe second mover.

In embodiments, the method 800 can include optionally causing, by theplatform of the magnetic levitation platform, the robot arm assembly toplace the first substrate in the first process chamber. The method 800can include optionally causing, by the platform, the first mover of theplurality of movers to rotate or to change a third distance to thesecond mover of the plurality of movers, wherein rotation of the firstmover or the change in the third distance between the first mover andthe second mover causes the robot arm to rotate about the shoulder axisand to enter the process chamber. In yet further embodiments, the method800 can include optionally causing, by the platform, one of a) thesecond mover to rotate or b) the third mover to change a fourth distanceto the second mover, wherein rotation of the second mover or the changein the fourth distance between the third mover and the second movercauses the robot arm to raise or lower and to place the first substrateon a support in the first process chamber.

According to embodiments, the method 800 can optionally includetransferring substrates between the transfer chamber and processchambers using a second robot arm assembly. The second robot armassembly can be as described herein according to various embodiments. Inembodiments, the method can optionally include causing, by the platformof the magnetic levitation platform, the second robot arm to pick up asecond substrate. In embodiments, the method 800 can include optionallycausing, by the platform, a fourth mover of the plurality of movers torotate or to change a third distance to the second mover of theplurality of movers, wherein rotation of the fourth mover or the changein the third distance between the fourth mover and the second movercauses the second robot arm to rotate about the shoulder axis. Accordingto further embodiments, the method 800 can include optionally causing,by the platform, one of a) the second mover to rotate or b) the thirdmover to change the second distance to the second mover. Rotation of thethird mover or the change in the second distance between the third moverand the second mover can cause the second robot arm to raise or lower.

Although the operations of the methods herein are shown and described ina particular order, the order of the operations of each method may bealtered so that certain operations may be performed in an inverse orderor so that certain operation may be performed, at least in part,concurrently with other operations. In another embodiment, instructionsor sub-operations of distinct operations may be in an intermittentand/or alternating manner.

It is to be understood that the above description is intended to beillustrative, and not restrictive. Many other embodiments will beapparent to those of skill in the art upon reading and understanding theabove description. The scope of the invention should, therefore, bedetermined with reference to the appended claims, along with the fullscope of equivalents to which such claims are entitled.

We claim:
 1. A robot, comprising: a first mover configured to be drivenalong a platform of a linear motor; a support structure disposed on thefirst mover; a first robot arm attached to a first end of the supportstructure at a shoulder axis; and a first arm drive assembly comprising:a first pulley attached to the first end of the support structure and tothe first robot arm at the shoulder axis; a second pulley attached to asecond end of the support structure; a first band connecting the firstpulley to the second pulley; and a second mover configured to be drivenalong the platform of the linear motor, wherein the second mover isconnected to the first band, and wherein motion of the second moverrelative to the first mover causes the first band to a) rotate the firstpulley and the second pulley and b) rotate the first robot arm aroundthe shoulder axis.
 2. The robot of claim 1, further comprising: a secondrobot arm attached to the support structure at the shoulder axis; and asecond arm drive assembly comprising: a third pulley attached to thefirst end of the support structure and to the second robot arm at theshoulder axis; a fourth pulley attached to the second end of the supportstructure, wherein the fourth pulley shares an axis with the secondpulley; a second band connecting the third pulley to the fourth pulley;and a third mover configured to be driven along the platform of thelinear motor, wherein the third mover is connected to the second band,and wherein motion of the third mover relative to the first mover causesthe second band to a) rotate the third pulley and the fourth pulley andb) rotate the second robot arm around the shoulder axis.
 3. The robot ofclaim 2, wherein the first robot arm and the first arm drive assemblyare positioned above or below the second robot arm and the second armdrive assembly.
 4. The robot of claim 2, further comprising: a thirdrobot arm attached to the support structure at the shoulder axis; and athird arm drive assembly comprising: a fifth pulley attached to thefirst end of the support structure and to the third robot arm at theshoulder axis; a sixth pulley attached to the second end of the supportstructure, wherein the sixth pulley shares an axis with the secondpulley; a third band connecting the fifth pulley to the sixth pulley;and a fourth mover configured to be driven along the platform of thelinear motor, wherein the fourth mover is connected to the third band,and wherein motion of the fourth mover relative to the first movercauses the third band to a) rotate the fifth pulley and the sixth pulleyand b) rotate the third robot arm about the shoulder axis.
 5. The robotof claim 1, further comprising: a lift mechanism attached to the firstmover; and a third mover configured to be driven along the platform ofthe linear motor, wherein the third mover is connected to the liftmechanism such that motion of the third mover relative to the firstmover causes the lift mechanism to adjust a height of the supportstructure and the first robot arm.
 6. The robot of claim 5, wherein thelift mechanism comprises a wedge lift, wherein a decrease in a distancebetween the first mover and the third mover causes the wedge lift toraise the support structure and the first robot arm, and wherein anincrease in the distance between the first mover and the third movercauses the wedge lift to lower the support structure and the first robotarm.
 7. The robot of claim 5, wherein the lift mechanism comprises alead screw, the robot further comprising: a nut attached to the leadscrew; a third pulley attached to the support structure; a second bandattaching the third pulley to the nut; wherein the third mover isattached to the second band, and wherein motion of the third moverrelative to the first mover causes a) the nut to rotate about the leadscrew and b) the support structure and the first robot arm to movevertically.
 8. The robot of claim 1, wherein the first robot armcomprises a first end effector at a distal end of the first robot arm.9. The robot of claim 1, further comprising: a first forearm attached toa distal end of the first robot arm at a forearm axis; a first forearmdrive assembly comprising: a first forearm pulley attached to the firstforearm at the forearm axis; a second forearm pulley attached to adistal end of the first forearm; and a first forearm band connecting thefirst forearm pulley to the second forearm pulley, wherein the rotationof the first pulley and the second pulley causes the second band to a)rotate the first forearm pulley and the second forearm pulley and b)rotate the first forearm around the forearm axis.
 10. A robot,comprising: a first mover configured to be driven along a platform of alinear motor; a support structure disposed on the first mover; a firstrobot arm positioned above the first mover and on the support structureat a shoulder axis; and a first arm drive assembly comprising: a firstpulley disposed at a first end of the support structure and attached tothe first robot arm at the shoulder axis; a second pulley disposed at asecond end of the support structure; a first band connecting the firstpulley to the second pulley; a second mover configured to be drivenalong the platform of the linear motor; and a first vertical shaftcoupled to the second mover, wherein the second pulley is connected tothe first vertical shaft, and wherein rotation of the second movercauses a) the second pulley to rotate the first band and b) the firstband to rotate the first pulley and the first robot arm about theshoulder axis.
 11. The robot of claim 10, wherein the support structureprovides a fixed separation between the first mover and the secondmover.
 12. The robot of claim 10, further comprising a lead screwattached to the first mover, wherein the first pulley is attached to anut on the lead screw, and wherein rotation of the first mover causesthe support structure, the first robot arm and the first arm driveassembly to move vertically.
 13. The robot of claim 10, furthercomprising: a second robot arm positioned above the first robot arm andon the support structure at the shoulder axis; and a second arm driveassembly comprising: a third pulley attached to the first end of thesupport structure and to the second robot arm at the shoulder axis; afourth pulley attached to the second end of the support structure,wherein the fourth pulley shares an axis with the second pulley; asecond band connecting the third pulley to the fourth pulley; a thirdmover configured to be driven by the platform of the linear motor; and asecond vertical shaft coupled to the third mover, wherein the fourthpulley is connected to the second vertical shaft, and wherein rotationof the third mover causes a) the fourth pulley to rotate the second bandand b) the second band to rotate the third pulley and the second robotarm about the shoulder axis.
 14. An electronic device processing system,comprising: a transfer chamber comprising a magnetic levitationplatform; and a robot disposed in the transfer chamber above themagnetic levitation platform, the robot comprising: a first moverconfigured to be driven by the magnetic levitation platform; a supportstructure disposed on the first mover; a first robot arm attached to afirst end of the support structure at a shoulder axis; and a first armdrive assembly comprising: a first pulley attached to the first end ofthe support structure and to the first robot arm at the shoulder axis; asecond pulley attached to a second end of the support structure; a firstband connecting the first pulley to the second pulley; and a secondmover configured to be driven by the magnetic levitation platform,wherein the second mover is connected to the first band, and whereinmotion of the second mover relative to the first mover causes the firstband to a) rotate the first pulley and the second pulley and b) rotatethe first robot arm around the shoulder axis.
 15. The system of claim14, wherein the robot further comprises: a second robot arm attached tothe support structure at the shoulder axis; and a second arm driveassembly comprising: a third pulley attached to the first end of thesupport structure and to the second robot arm at the shoulder axis; afourth pulley attached to the second end of the support structure,wherein the fourth pulley shares an axis with the second pulley; asecond band connecting the third pulley to the fourth pulley; and athird mover configured to be driven by the magnetic levitation platform,wherein the third mover is connected to the second band, and whereinmotion of the third mover relative to the first mover causes the secondband to a) rotate the third pulley and the fourth pulley and b) rotatethe second robot arm around the shoulder axis.
 16. The system of claim14, wherein the robot further comprises: a lift mechanism attached tothe first mover; and a third mover configured to be driven by themagnetic levitation platform, wherein the third mover is connected tothe lift mechanism such that motion of the third mover relative to thefirst mover causes the lift mechanism to adjust a height of the supportstructure and the first robot arm.